Automatic linewidth measuring instrument
| Project | Paramters | Acceptance method |
|---|---|---|
| Device size | 1960mm×1600mm×1500mm | Tape measure measurement |
| Machine weight | Approx. 1.5 T | Approx. 2.06T |
| Power requirements | AC220+N+PE/50Hz/2.5KW | Multimeter measurement |
| Vacuum air pressure | 0.3-0.6 Mpa | Observe the electronic barometer |
| Computer configuration | Industrial computer, 27-inch monitor, 17/16G/1T hard drive | Power on confirmation |
| Maximum travel in the X/Y/Z axis | X:750mm ;Y:1000mm ;Z:100mm ; | Normal use |
| Speed of movement | X.Y=300mm/S Z=200mm/S | Normal use |
| Metal grating scale accuracy | 0.1um | Normal use |
| Positioning accuracy | +3um | Normal use |
| Measurement function | Inner or outer PCB board development and etching within the camera's field of view (line width/line spacing/line width upper and lower width/circle/gold finger line width/pad/SMT-PAD/etc.) measurement functions) | Normal use |
| Platform Measurement Range (W*L) | W:750mmxL:1000mm | Tape measure measurement |
| Countertop structure | Full-surface adsorption platform + side positioning + 1.0mm array hole adsorption | |
| Plate thickness range | 0.05mm-6mm | visual inspection |
| Line width/line spacing measurement range | 15um-2600um (0.6mil-102mil) | Normal use |
| Operating mode | Automatically run measurements after programming | Normal use |